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We demonstrate device field characterization using NSOM collection and interaction measurement modes via the backside buried-oxide of large scale photonic circuits fabricated in monolithic electronics-photonics CMOS platforms (here a microdisk resonator) post-processed using flip-chip substrate-removal. 

Grating coupler devices provide efficient, foundry-compatible vertical fiber-to-chip coupling solutions in integrated photonic platforms. However, standard grating coupler designs are highly polarization sensitive, which hinders their adoption. We present a new, to the best of our knowledge, type of 1D polarization-insensitive grating coupler (PIGC) that is based on a zero-birefringence subwavelength “corelet” waveguide. We demonstrate a PIGC for coupling in the telecommunications O-band in a 45-nm-node monolithic silicon-on-insulator (SOI) CMOS electronic-photonic platform, with measured insertion losses of 6.7 and 6.1 dB to transverse electric and transverse magnetic polarizations, respectively, and a ±1-dB polarization dependent loss bandwidth of 73 nm.

 

Convergence of high-performance silicon photonics and electronics, monolithically integrated in state-of-the-art CMOS platforms, is the holy grail for enabling the ultimate efficiencies, performance, and scaling of electronic-photonic systems-on-chip. It requires the emergence of platforms that combine state-of-the-art RF transistors with optimized silicon photonics, and a generation of photonic device technology with ultralow energies, increased operating spectrum, and the elimination of power-hungry thermal tuning. In this paper, in a co-optimized monolithic electronics-photonics platform (GlobalFoundries 45CLO), we turn the metal-oxide-semiconductor (MOS) field-effect transistor’s basic structure into a novel, highly efficient MOS capacitor ring modulator. It has the smallest ring cavity (1.5 μm radius), largest corresponding spur-free free spectral range ( FSR = 8.5    THz ), and record 30 GHz/V shift efficiency in the O-band among silicon modulators demonstrated to date. With 1 V pp RF drive, we show an open optical eye while electro-optically tuning the modulator to track over 400 pm (69 GHz) change in the laser wavelength (using 2.5 V DC range). A 90 GHz maximum electro-optic resonance shift is demonstrated with under 40 nW of power, providing a strong nonthermal tuning mechanism in a CMOS photonics platform. The modulator has a separately optimized body layer but shares the gate device layer and the gate oxide with 45 nm transistors, while meeting all CMOS manufacturability design rules. This type of convergent evolution of electronics and photonics may be the future of platforms for high-performance systems-on-chip. 

We demonstrate a monolithically integrated 6^th-order filter, with heater driver circuits implemented alongside photonics in a zero-change 45 nm CMOS platform, achieving<1 dB drop loss and>80 dB on-chip pump power suppression.

 

We report on microring modulators in the new 45CLO photonics-optimized 45 nm electronic-photonic CMOS platform. Interdigitated disk and vertical-junction rib microring de- signs are demonstrated, with 20 GHz bandwidth at 25 Gbps data rate. 

We propose an on-chip triply resonant electro-optic modulator architecture for RF-to-optical signal conversion and provide a detailed theoretical analysis of the optimal “circuit-level” device geometries and their performance limits. The designs maximize the RF-optical conversion efficiency through simultaneous resonant enhancement of the RF drive signal, a continuous-wave (CW) optical pump, and the generated optical sideband. The optical pump and sideband are resonantly enhanced in respective supermodes of a two-coupled-cavity optical resonator system, while the RF signal can be enhanced in addition by an LC circuit formed by capacitances of the optical resonator active regions and (integrated) matching inductors. We show that such designs can offer 15-50 dB improvement in conversion efficiency over conventional microring modulators. In the proposed configurations, the photon lifetime (resonance linewidth) limits the instantaneous RF bandwidth of the electro-optic response but does not limit its central RF frequency. The latter is set by the coupling strength between the two coupled cavities and is not subject to the photon lifetime constraint inherent to conventional singly resonant microring modulators. This feature enables efficient operation at high RF carrier frequencies without a reduction in efficiency commonly associated with the photon lifetime limit and accounts for 10-30 dB of the total improvement. Two optical configurations of the modulator are proposed: a “basic” configuration with equal Q-factors in both supermodes, most suitable for narrowband RF signals, and a “generalized” configuration with independently tailored supermode Q-factors that supports a wider instantaneous bandwidth. A second significant 5-20 dB gain in modulation efficiency is expected from RF drive signal enhancement by integrated LC resonant matching, leading to the total expected improvement of 15-50 dB. Previously studied triply-resonant modulators, with coupled longitudinal (across the free spectral range (FSR)) modes, have large resonant mode volume for typical RF frequencies, which limits the interaction between the optical and RF fields. In contrast, the proposed modulators support maximally tightly confined resonant modes, with strong coupling between the mode fields, which increases and maintains high device efficiency across a range of RF frequencies. The proposed modulator architecture is compact, efficient, capable of modulation at high RF carrier frequencies and can be applied to any cavity design or modulation mechanism. It is also well suited to moderate Q, including silicon, implementations, and may be enabling for future CMOS RF-electronic-photonic systems on chip.

 

We demonstrate a coupled-cavity electro-optic modulator with 5.5 GHz bandwidth centered at 41 GHz. The device, driven with a −5 dBm RF signal, shows −27 dB pump-to-sideband conversion efficiency, a 15 dB improvement over a regular ring modulator. 

We experimentally demonstrate rapid adiabatic coupling (RAC), a novel design concept that harnesses the benefits and addresses the disadvantages of adiabatic photonic structures. The 31μm long 2x2 coupler shows 3±0.3dB splitting over 130nm bandwidth. 

Optical phased arrays (OPAs) implemented in integrated photonic circuits could enable a variety of 3D sensing, imaging, illumination, and ranging applications, and their convergence in new lidar technology. However, current integrated OPA approaches do not scale—in control complexity, power consumption, or optical efficiency—to the large aperture sizes needed to support medium- to long-range lidar. We present the serpentine OPA (SOPA), a new OPA concept that addresses these fundamental challenges and enables architectures that scale up to large apertures. The SOPA is based on a serially interconnected array of low-loss grating waveguides and supports fully passive, 2D wavelength-controlled beam steering. A fundamentally space-efficient design that folds the feed network into the aperture also enables scalable tiling of SOPAs into large apertures with a high fill-factor. We experimentally demonstrate, to the best of our knowledge, the first SOPA using a 1450–1650 nm wavelength sweep to produce 16,500 addressable spots in a$27\times <\#comment/>610$array. We also demonstrate, for the first time, far-field interference of beams from two separate OPAs on a single silicon photonic chip, as an initial step towards long-range computational imaging lidar based on novel active aperture synthesis schemes.